Seven questions about how North Microelectronics is made into equipment

[Source: "New Industry" August issue Yang Jinxia Sun Yanwei]

Founded in 2001, North Microelectronics Co., Ltd. has been engaged in the development of integrated circuit manufacturing equipment for the National “10th Five-Year Plan” 863 Program since its inception.

Five years later, the 100-nanometer 8-inch high-density plasma etching machine developed by Northern Microelectronics entered the large production line and began mass production.

Since 2008, North Microelectronics has undertaken major projects in the “Twelfth Five-Year Plan”, “Minimum Scale Integrated Circuit Manufacturing Equipment and Complete Process”, and launched research and development of high-end semiconductor equipment including 12-inch high-density plasma etching machine and copper interconnect PVD. And the production, at the same time, the development of high-end equipment such as ICP etching machine, ITOSPUTTER sputtering equipment and MOCVD (LED epitaxial wafer production equipment) in the LED field, directly confronting the international giants, trying to fill the gap in China's high-end semiconductor equipment.

Can Northern Microelectronics succeed? What success?

Recently, "New Industry" and Zhao Jinrong, president of Beijing Microelectronics, conducted in-depth discussions on the development prospects of high-end semiconductor equipment in China.

"New Industry": The "Twelfth Five-Year Development Plan for High-end Equipment Manufacturing Industry" recently released by the state proposes that by 2015, the sales revenue of high-end equipment manufacturing industry will exceed 6 trillion yuan, and the proportion in the equipment manufacturing industry will increase. 15%. Excuse me, is the importance of R&D of high-end equipment in China to China's manufacturing upgrade?

Zhao Jinrong: Why is the international semiconductor giant like Intel long-term in the leading position of technology? An important reason is that it has close cooperation and long-term support from the local and international equipment companies in the United States.

Each generation of Intel's process technology innovations is jointly developed by the equipment companies that work closely with them. The US equipment companies will develop equipment according to Intel's process requirements and provide them to Intel. Of course, both parties will also sign and maintain the continuous technological leadership of both parties. Strategic agreement.

Samsung Electronics, which has risen rapidly in recent years, is even more so. At present, in the field of high-end chip manufacturing, the core equipment independently developed is close to 50%.

At present, the international LED chip manufacturers of the United States, Japan and South Korea also maintain similar strategic partnerships with local advanced equipment manufacturers. However, Chinese semiconductor chip manufacturers mainly rely on the introduction of mature equipment from abroad to obtain technological upgrading. The strategic cooperation with domestic high-end equipment companies has only just begun in the past one or two years, and is limited to very few enterprises. .

Fortunately, more and more leading companies have realized that relying on the purchase of mature process equipment will always be one to two generations behind others. Leading technology cannot be bought. It is difficult for enterprises without core leading technology and unique advantages to have market competition. force.

"New Industry": Do you think that the high-end equipment manufacturing capability of Northern Microelectronics will reach the level of the world's leading equipment companies?

Zhao Jinrong: The improvement of China's high-end equipment level depends on the degree of Chinese chip companies' desire for innovation and the ability to invest in funds. It depends on the degree of trust of chip companies in domestic equipment, especially to overcome blindness.

Today's domestic chip makers' technology level is far from the international giants such as Intel and Samsung. On the one hand, many US high-end equipment imposes sales restrictions on Chinese companies based on national security or corporate competitive interests. As a result, the gap between the technical level of domestic chip companies and the international advanced level has increased, and the catch-up speed is slowing down.

On the other hand, Chinese chip companies' investment in technology research and development is far from the international leading companies. Although China's high-end equipment companies have achieved remarkable results in the past five years, the continuous investment in enterprise technology research and development is still far from the research and development expenses of leading international equipment companies.

High-end equipment is the materialization of production technology, the manufacturing tool of large production lines, the demand determines the supply, and the world-class chip companies and the world-class equipment companies are interdependent and mutually reinforcing.

In the field of photovoltaic solar cells, some domestic solar cell manufacturers have been upgrading their technology by purchasing the best and most expensive imported equipment in recent years, and to show their leading level of technology by purchasing the most expensive imported equipment.

However, the localization rate of high-end equipment for leading photovoltaic cell companies in China is close to 90% today. The technical performance and cost control of domestic solar cell products have reached the international leading level. This achievement has been independently developed and developed by domestic high-end photovoltaic equipment. Rapid development is inseparable.

I believe that in the next three years, China's LED chip field will be the same. Only the most expensive imported equipment can't prove its technical ability, and it can't represent the technological leadership of the enterprise. Only companies with their own core technology can survive.

The core technology requires the strategic cooperation and continuous support of high-end equipment companies. Now, some strategic LED chip manufacturers have begun to actively cooperate with local equipment manufacturers to jointly develop the mass production equipment needed for the next generation technology and new technology.

When domestic chip enterprise technology leads the world, it is the time when domestic equipment companies reach the level of world-class enterprises.

(unfinished)

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